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Any source to this? I am hearing this for the first time.


ITs easy to make X-rays, you just hit a metal target with electrons: https://en.wikipedia.org/wiki/X-ray_tube


You can hit metal the same way for EUV.


No you can't, or rather you only get a tiny amount in the correct wavelengths


I assume this doesn't work well otherwise everyone would be doing it.




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